SEM instrument with ultra-high resolution (UHR) lens and detector

For high-resolution (HR) and HR/low-kV SEM at small working distances, and EDX

Operated since 2001

1-30 kV Schottky FEG

Resolution in UHR mode: 1.5 nm at 10 kV (or higher); 2.5 nm at 1 kV

Equipped with: standard Everhart-Thornley secondary-electron (SE) detector; ultra-high resolution (UHR) lens and in-lens SE detector; insertable 4 quadrant backscattered electron (BE) detector; Oxford Inst. EDX detector. Instrument rests on anti-vibration table

Applications: SE; BE; HR SEM; low-kV SEM; EDX