XLF30-EBSP

FEI XL30-EBSP

SEM instrument dedicated to electron backscattered diffraction (EBSD) and X-ray spectroscopy for crystallographic and chemical microanalysis

Operated since 1998; EBSD/EDX system upgraded 2008

1-30 kV Schottky FEG

Oxford Instruments INCASynergy 350 for combined EDX and EBSD microanalysis incorporating state of the art INCAx-act silicon drift detector for rapid and accurate EDX mapping and high sensitivity/resolution NordlysS II EBSD detector 

SEM imaging resolution: 2 nm (30 kV); 5 nm (1 kV)

Applications: EDX; EBSD; SE; BE