XLF30-FEG

FEI XLF30-FEG

General use SEM instrument

For secondary-electron (SE) and backscattered-electron (BE) imaging, and EDX

Operated since 1996

1-30 kV Schottky FEG

SE imaging resolution: 2 nm at 30 kV; 8 nm at 1 kV

Equipped with: Everhart-Thornley secondary-electron (SE) detector; backscattered electron (BE) detector; EDAX Si(Li) EDX detector with ultra-thin window for light element analysis

Applications: SEBEEDX